Laboratory & Manufacturing Automation
Manufacturing Automation & Autonomous Agents
Autonomous inspection, measurement and processing systems for high-precision manufacturing.
Product Series
Products
Wafer Overlay Metrology System
Automatic overlay measurement for 6/8/12-inch wafers, single- and double-sided.
Typical configuration
- NA 0.7 optics
- Broadband tunable illumination
- AI sub-pixel algorithms
Configuration confirmed per project
Precision Defect Inspection Systems
AI vision inspection for semiconductor, display and new-energy components.
Configuration confirmed per project
Precision Processing & Cutting Systems
Automated precision cutting to maximise yield (details on request).
Configuration confirmed per project
Display & Finished-Device Visual Inspection
Automated optical inspection of panels and assembled devices.
Configuration confirmed per project